Brooks 5850TR/FA1C2B2 Mass Flow Controller

Manufacturer: BROOKS
Type: Mass Flow Controller
Model: 5850TR/FA1C2B2   

Flow input and Output: 0 … 5 VDC
Max. Pressure: 100 bar
Fluid: Air
Accuracy: +-1%
Range: 0 … 25 SCCM
Electrical connection: 15-pin
Ambient Temperature: 0 … 65 °C
Port Size: 15 mm